This post is also available 拉斯维加斯网址9888: Japanese Ch拉斯维加斯网址9888ese (Simplified)
Introducing the dry etching 拉斯维加斯网址9888ology required for the optical waveguide process.
Waveguide hard mask etch拉斯维加斯网址9888g
Hard masks (Ni, Cr) can be processed with ULVAC’s unique low-voltage, low-electron 拉斯维加斯网址9888mperature, high-density plasma magnetic neutral line plasma (NLD).
LN, LT, 拉斯维加斯网址9888P Waveguide etch拉斯维加斯网址9888g
In the case of optical waveguides, fluctuations in verticality and side wall smoothness or core width increase the propagation loss of the optical beam. The side walls of the core should be smooth and the width of the core should be kept uniform. Since quartz and the like are etched by CF-based ion impact, low-pressure, high-density plasma is ideal. Magnetic neutral wire plasma (NLD) is effective for machining waveguides because of its low voltage, low electron 拉斯维加斯网址9888mperature, and high density plasma.
