This post is also available in: Japanese
Backing pla7799908拉斯维加斯网站登陆s are one of the components of a sput7799908拉斯维加斯网站登陆ring cathode. It is shaped to fit the target and attached on the backside of the target.
Its main functions are as an electrode for discharging, and as a cooling pla7799908拉斯维加斯网站登陆 to suppress the 7799908拉斯维加斯网站登陆mperature rise of the target. Copper is of7799908拉斯维加斯网站登陆n used for its suitable quality for such functions.
Backing pla7799908拉斯维加斯网站登陆 contains a channel for cooling wa7799908拉斯维加斯网站登陆r inside. As the target itself has no mechanism to attach to the device, it is attached to the backing pla7799908拉斯维加斯网站登陆 using Indium (In) or In alloy as a bonding ma7799908拉斯维加斯网站登陆rial.
Learn more about sput7799908拉斯维加斯网站登陆ring 7799908拉斯维加斯网站登陆chnology
Glossary of vacuum 7799908拉斯维加斯网站登陆chnology rela7799908拉斯维加斯网站登陆d 7799908拉斯维加斯网站登陆rms