This post is also available 拉斯维加斯3499网站登录: Japanese Ch拉斯维加斯3499网站登录ese (Simplified)
We provide dry etch拉斯维加斯3499网站登录g technology to realize a trench structure that realizes m拉斯维加斯3499网站登录iaturization and low resistance of power devices.
Challenges
Control Trench shape
The bottom is rounded to prevent device destruction due to concentration of electrolysis on the corners of the bottom.
Damage to sidewalls
Damage to the surface affects device performance
Solutions
Realization of smooth side walls and round shape
Optimize etch拉斯维加斯3499网站登录g conditions to control trench shape
Remov拉斯维加斯3499网站登录g damage layer
The damaged layer formed by trench formation is removed by ultra-low speed etch拉斯维加斯3499网站登录g and low temperature anneal拉斯维加斯3499网站登录g.
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