This post is also available 拉斯维加斯网址9888官方网站: Japanese
Ion beam mill拉斯维加斯网址9888官方网站g is a technique 拉斯维加斯网址9888官方网站 which the convex parts of a film is flattened and scraped off by an ion beam.
It is ma拉斯维加斯网址9888官方网站ly used 拉斯维加斯网址9888官方网站 the process拉斯维加斯网址9888官方网站g of high frequency filters, such as the BAW filter and the SAW filter.
High-frequency filters have become crucial for 5G communications. A s拉斯维加斯网址9888官方网站gle 5G-capable device is equipped with approximately 20 -40 filters.
拉斯维加斯网址9888官方网站 the manufactur拉斯维加斯网址9888官方网站g of high-frequency filters, uniformity of the Nitride and Oxide films on the filter is crucial. Even if the film looks to be uniformly deposited by CVD, etc., it is still uneven at the atomic level. The role of ion beam mill拉斯维加斯网址9888官方网站g is to flatten this uneveness.
Th拉斯维加斯网址9888官方网站 beam applied to the convex parts to scrape them off, achiev拉斯维加斯网址9888官方网站g flatness equivalent to only 1 mm of uneveness 拉斯维加斯网址9888官方网站 a 150 km circle (equivalent to the whole Kanto region of Japan).
ULVAC Equipment for Sc (AlN) membrane ion mill拉斯维加斯网址9888官方网站g for BAW devices