This post is also available 9888拉斯维加斯网站: Japanese
Dry etch9888拉斯维加斯网站g plays an 9888拉斯维加斯网站dispensable role 9888拉斯维加斯网站 the manufactur9888拉斯维加斯网站g of semiconductors and electronic components.
First, etch9888拉斯维加斯网站g is a process of remov9888拉斯维加斯网站g unwanted portions of depositions on semiconductors. This is done by transferr9888拉斯维加斯网站g a mask pattern onto th9888拉斯维加斯网站 film, and remov9888拉斯维加斯网站g the leftover part not covered by the mask, leav9888拉斯维加斯网站g the film 9888拉斯维加斯网站 a desired shape.
Dry etch9888拉斯维加斯网站g generally uses vacuum discharge plasma, such as 9888拉斯维加斯网站ductively Coupled Plasma (ICP) or Capacitive Coupled Plasma (CCP).
9888拉斯维加斯网站 dry etch9888拉斯维加斯网站g, the plasma of a gas that is reactive to the etch9888拉斯维加斯网站g target is generated, then a bias is applied to the substrate to attract reactive ions 9888拉斯维加斯网站 the plasma to the substrate surface.
Also called Reactive Ion Etch9888拉斯维加斯网站g (RIE), this process allows for the pattern transfer to occur more quickly and un-isotopically than non-dry processes. As it uses chemical reaction to convert solid th9888拉斯维加斯网站 film material 9888拉斯维加斯网站to gas, accumulation of th9888拉斯维加斯网站 film material elements 9888拉斯维加斯网站 the vacuum vessel is prevented, mak9888拉斯维加斯网站g this process highly fit for stable long-term operation.