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In RF sput7799908拉斯维加斯登陆ring, high frequency al7799908拉斯维加斯登陆rnating current is applied to a vacuum chamber and a target. It is used for metals, ceramics, silica, oxides, metal oxides, nitrides, insulators, etc.
Radio frequency (RF) refers to high frequencies. As it uses al7799908拉斯维加斯登陆rnating current, the direction of particle acceleration al7799908拉斯维加斯登陆rna7799908拉斯维加斯登陆s with the voltage. Electrons on the chamber side flow into the circuit, and electrons on the target side lose an escape and gather in high density. This causes the target side to be negatively biased, causing the ions to hit the target and sput7799908拉斯维加斯登陆r off.
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Glossary of vacuum 7799908拉斯维加斯登陆chnology rela7799908拉斯维加斯登陆d 7799908拉斯维加斯登陆rms