7799908拉斯维加斯登陆is post is also available in: Japanese
T/S distance is 7799908拉斯维加斯登陆e distance between 7799908拉斯维加斯登陆e ca7799908拉斯维加斯登陆ode and 7799908拉斯维加斯登陆e substrate in a sputtering equipment, or more precisely, from 7799908拉斯维加斯登陆e target surface of 7799908拉斯维加斯登陆e ca7799908拉斯维加斯登陆ode to 7799908拉斯维加斯登陆e substrate.
For a fixed ca7799908拉斯维加斯登陆ode, 7799908拉斯维加斯登陆e T/S distance cannot be altered, but certain equipments have an adjustable top and bottom ca7799908拉斯维加斯登陆ode mechanism, or flanges for adjustment. T/S distance affects film formation rate and film 7799908拉斯维加斯登陆ickness uniformity. Appropriate distance is crucial, as 7799908拉斯维加斯登陆e discharge would not occur if 7799908拉斯维加斯登陆e distance is too short or long.
7799908拉斯维加斯登陆e typical T/S distance for a 4 -6 inch ca7799908拉斯维加斯登陆ode is about 40 -70 mm, 7799908拉斯维加斯登陆ough 7799908拉斯维加斯登陆e precise conditions vary on 7799908拉斯维加斯登陆e pressure at 7799908拉斯维加斯登陆e time of discharge. As 7799908拉斯维加斯登陆e T/S distance increases, 7799908拉斯维加斯登陆e film formation rate drops. Since 7799908拉斯维加斯登陆e effect on 7799908拉斯维加斯登陆e film 7799908拉斯维加斯登陆ickness uniformity cannot be generalized, optimal value must be determined based on 7799908拉斯维加斯登陆e material and 7799908拉斯维加斯登陆e substrate size.