{"version":"1.0","provider_name":"ULVAC","provider_url":"https:\/\/www.ulvac.co.jp\/wiki\/en\/","author_name":"kumiko_mitsueda","author_url":"https:\/\/www.ulvac.co.jp\/wiki\/en\/author\/kumiko_mitsueda\/","title":"SiC Trench etching","type":"rich","width":600,"height":338,"html":"
SiC Trench etching<\/a><\/blockquote>