{"id":3843,"date":"2021-01-27T09:21:22","date_gmt":"2021-01-27T00:21:22","guid":{"rendered":"https:\/\/www.ulvac.co.jp\/wiki\/?p=3843\/"},"modified":"2022-02-28T09:10:39","modified_gmt":"2022-02-28T00:10:39","slug":"process_g_gan_trench","status":"publish","type":"post","link":"https:\/\/www.ulvac.co.jp\/wiki\/en\/process_g_gan_trench\/","title":{"rendered":"GaN Trench etching"},"content":{"rendered":"<p>We provide dry etching technology to realize a trench structure that realizes miniaturization and low resistance of power devices.<br \/>拉斯维加斯网址9888官方网站<\/p>拉斯维加斯网址9888官方网站<h3>Challenges<\/h3>拉斯维加斯网址9888官方网站<h4><b>Control Trench shape<\/b><\/h4>拉斯维加斯网址9888官方网站<p>The bottom is rounded to prevent device destruction due to concentration of electrolysis on the corners of the bottom.<\/p>拉斯维加斯网址9888官方网站<h4><b>Damage to sidewalls<\/b><\/h4>拉斯维加斯网址9888官方网站<p>Damage to the surface affects device performance<\/p>拉斯维加斯网址9888官方网站<p><\/p>拉斯维加斯网址9888官方网站<h3>Solutions<\/h3>拉斯维加斯网址9888官方网站<h4>Realization of smooth side walls and round shape<\/h4>拉斯维加斯网址9888官方网站<p>Optimize etching conditions to control trench shape<\/p>拉斯维加斯网址9888官方网站<h4><b>Removing damage layer<\/b><\/h4>拉斯维加斯网址9888官方网站<p>The damaged layer formed by trench formation is removed by ultra-low speed etching and low temperature annealing.<\/p>拉斯维加斯网址9888官方网站<table>拉斯维加斯网址9888官方网站<tbody>拉斯维加斯网址9888官方网站<tr>拉斯维加斯网址9888官方网站<td><a href=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2016\/04\/GaN_trench.png\" rel=\"lightbox-0\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter wp-image-3201 size-medium\" src=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2016\/04\/GaN_trench-300x240.png\" alt=\"\" width=\"300\" height=\"240\" \ alt="拉斯维加斯网址9888官方网站" /><\/a><\/td>拉斯维加斯网址9888官方网站<td>拉斯维加斯网址9888官方网站<table width=\"472\">拉斯维加斯网址9888官方网站<tbody>拉斯维加斯网址9888官方网站<tr>拉斯维加斯网址9888官方网站<td width=\"161\">material<\/td>拉斯维加斯网址9888官方网站<td width=\"312\">GaN<\/td>拉斯维加斯网址9888官方网站<\/tr>拉斯维加斯网址9888官方网站<tr>拉斯维加斯网址9888官方网站<td width=\"161\">mask<\/td>拉斯维加斯网址9888官方网站<td width=\"312\">SiO2<\/td>拉斯维加斯网址9888官方网站<\/tr>拉斯维加斯网址9888官方网站<tr>拉斯维加斯网址9888官方网站<td width=\"161\">size<\/td>拉斯维加斯网址9888官方网站<td width=\"312\">W 0.5um, D 1.5um<\/td>拉斯维加斯网址9888官方网站<\/tr>拉斯维加斯网址9888官方网站<tr>拉斯维加斯网址9888官方网站<td width=\"161\">ER<\/td>拉斯维加斯网址9888官方网站<td width=\"312\">400nm\/min<\/td>拉斯维加斯网址9888官方网站<\/tr>拉斯维加斯网址9888官方网站<tr>拉斯维加斯网址9888官方网站<td width=\"161\">Selectivity<\/td>拉斯维加斯网址9888官方网站<td width=\"312\">\uff1e5.0<\/td>拉斯维加斯网址9888官方网站<\/tr>拉斯维加斯网址9888官方网站<\/tbody>拉斯维加斯网址9888官方网站<\/table>拉斯维加斯网址9888官方网站<\/td>拉斯维加斯网址9888官方网站<\/tr>拉斯维加斯网址9888官方网站<\/tbody>拉斯维加斯网址9888官方网站<\/table>拉斯维加斯网址9888官方网站<p><\/p>拉斯维加斯网址9888官方网站<h4 class=\"mod-title-h1 mod-title-h1--center mgb-pc--50 mgb-sp--55\" style=\"text-align: center;\"><strong>Contact Us<\/strong><\/h4>拉斯维加斯网址9888官方网站<h4 style=\"text-align: center;\"><strong><a target=\"_blank\" href=\"https:\/\/www.ulvac.co.jp\/en\/contact\/elec_inquiry\/index.html\" rel=\"noopener\">https:\/\/www.ulvac.co.jp\/en\/contact\/elec_inquiry\/<\/a><\/strong><\/h4>拉斯维加斯网址9888官方网站<h4 style=\"text-align: center;\">Dry Etching system<\/h4>拉斯维加斯网址9888官方网站<h4 style=\"text-align: center;\"><a target=\"_blank\" href=\"https:\/\/www.ulvac.co.jp\/en\/products\/etching_system\/_ne-5700ne-7800\/index.html\" rel=\"noopener\">https:\/\/www.ulvac.co.jp\/en\/products\/etching_system\/<\/a><\/h4>拉斯维加斯网址9888官方网站","protected":false},"excerpt":{"rendered":"<p>We provide dry etching technology to realize a trench structure that realizes miniaturization and low resistance of power devices.<\/p>\n","protected":false},"author":17,"featured_media":3201,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[74],"tags":[],"class_list":["post-3843","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-power-device"],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/posts\/3843"}],"collection":[{"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/users\/17"}],"replies":[{"embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/comments?post=3843"}],"version-history":[{"count":3,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/posts\/3843\/revisions"}],"predecessor-version":[{"id":4822,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/posts\/3843\/revisions\/4822"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/media\/3201"}],"wp:attachment":[{"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/media?parent=3843"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/categories?post=3843"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/tags?post=3843"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}