{"id":3860,"date":"2021-02-11T12:41:38","date_gmt":"2021-02-11T03:41:38","guid":{"rendered":"https:\/\/www.ulvac.co.jp\/wiki\/?p=3860\/"},"modified":"2022-02-21T09:34:52","modified_gmt":"2022-02-21T00:34:52","slug":"process_g_baw","status":"publish","type":"post","link":"https:\/\/www.ulvac.co.jp\/wiki\/en\/process_g_baw\/","title":{"rendered":"BAW Device manufacturing"},"content":{"rendered":"<p>A BAW device is a filter that extracts electrical signals in a specific frequency band by using the bulk vibration of a piezoelectric material.<\/p>拉斯维加斯网址9888<p><\/p>拉斯维加斯网址9888<h3>BAW Device manufacturing flow<\/h3>拉斯维加斯网址9888<table>拉斯维加斯网址9888<tbody>拉斯维加斯网址9888<tr>拉斯维加斯网址9888<td><a href=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2020\/12\/Sub.png\" rel=\"lightbox-0\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-3471\" src=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2020\/12\/Sub.png\" alt=\"\" width=\"269\" height=\"71\" \ alt="拉斯维加斯网址9888" /><\/a><\/td>拉斯维加斯网址9888<td>拉斯维加斯网址9888<h4>1. Bottom electrode<\/h4>拉斯维加斯网址9888<\/td>拉斯维加斯网址9888<\/tr>拉斯维加斯网址9888<tr>拉斯维加斯网址9888<td><a href=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2020\/12\/19f2c3fb29d54e2c559b95535b6fe847.png\" rel=\"lightbox-1\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-3472\" src=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2020\/12\/19f2c3fb29d54e2c559b95535b6fe847.png\" alt=\"\" width=\"286\" height=\"132\" srcset=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2020\/12\/19f2c3fb29d54e2c559b95535b6fe847.png 286w, https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2020\/12\/19f2c3fb29d54e2c559b95535b6fe847-285x132.png 285w\" sizes=\"(max-width: 286px) 100vw, 286px\" \ alt="拉斯维加斯网址9888" /><\/a><\/td>拉斯维加斯网址9888<td>拉斯维加斯网址9888<h4>2. Bottom electrode etching<\/h4>拉斯维加斯网址9888<\/td>拉斯维加斯网址9888<\/tr>拉斯维加斯网址9888<tr>拉斯维加斯网址9888<td><a href=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2020\/12\/ScAlN.png\" rel=\"lightbox-2\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-3473\" src=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2020\/12\/ScAlN.png\" alt=\"\" width=\"269\" height=\"121\" \ alt="拉斯维加斯网址9888" /><\/a><\/td>拉斯维加斯网址9888<td>拉斯维加斯网址9888<h4>3. Forming Piezo film<\/h4>拉斯维加斯网址9888<p>Sputtering for\uff08Sc)AlN<\/p>拉斯维加斯网址9888<p><a href=\"https:\/\/www.ulvac.co.jp\/wiki\/en\/process_g_baw_tech\/\">Process Technology for BAW device<\/a><\/td>拉斯维加斯网址9888<\/tr>拉斯维加斯网址9888<tr>拉斯维加斯网址9888<td><a href=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2020\/12\/a545ff2ed034b398cc1b156a0593324d.png\" rel=\"lightbox-3\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-3474\" src=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2020\/12\/a545ff2ed034b398cc1b156a0593324d.png\" alt=\"\" width=\"269\" height=\"155\" \/><\/a><\/td>拉斯维加斯网址9888<td>拉斯维加斯网址9888<h4>4. Etching Piezo film<\/h4>拉斯维加斯网址9888<p>Providing etching technology that minimizes the amount of digging of the base electrode<\/p>拉斯维加斯网址9888<p><a href=\"https:\/\/www.ulvac.co.jp\/wiki\/en\/process_g_baw_tech\/\">Process Technology for BAW device<\/a><\/td>拉斯维加斯网址9888<\/tr>拉斯维加斯网址9888<tr>拉斯维加斯网址9888<td><a href=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2020\/12\/1f249f14d28ee966d50015827574af02.png\" rel=\"lightbox-4\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-3475\" src=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2020\/12\/1f249f14d28ee966d50015827574af02.png\" alt=\"\" width=\"269\" height=\"164\" \/><\/a><\/td>拉斯维加斯网址9888<td>拉斯维加斯网址9888<h4>5. Top electrode<\/h4>拉斯维加斯网址9888<\/td>拉斯维加斯网址9888<\/tr>拉斯维加斯网址9888<tr>拉斯维加斯网址9888<td><a href=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2020\/12\/4d93aac33bcd06347bcccba80cb8b6aa.png\" rel=\"lightbox-5\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-3476\" src=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2020\/12\/4d93aac33bcd06347bcccba80cb8b6aa.png\" alt=\"\" width=\"269\" height=\"166\" \/><\/a><\/td>拉斯维加斯网址9888<td>拉斯维加斯网址9888<h4>6. Top electrode etching<\/h4>拉斯维加斯网址9888<\/td>拉斯维加斯网址9888<\/tr>拉斯维加斯网址9888<tr>拉斯维加斯网址9888<td><a href=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2020\/12\/89fec48031966389d6cc5e5bac5aa08c.png\" rel=\"lightbox-6\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-3477\" src=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2020\/12\/89fec48031966389d6cc5e5bac5aa08c.png\" alt=\"\" width=\"269\" height=\"135\" \/><\/a><\/td>拉斯维加斯网址9888<td>拉斯维加斯网址9888<h4>7. Isolation layer<\/h4>拉斯维加斯网址9888<\/td>拉斯维加斯网址9888<\/tr>拉斯维加斯网址9888<tr>拉斯维加斯网址9888<td>\u00a0<a href=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2020\/12\/2bcfbf69693fd80ff5ea6011b280c803.png\" rel=\"lightbox-7\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-3585\" src=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2020\/12\/2bcfbf69693fd80ff5ea6011b280c803.png\" alt=\"\" width=\"269\" height=\"150\" \/><\/a><\/td>拉斯维加斯网址9888<td>拉斯维加斯网址9888<h4>8. Isolation layer etching<\/h4>拉斯维加斯网址9888<\/td>拉斯维加斯网址9888<\/tr>拉斯维加斯网址9888<tr>拉斯维加斯网址9888<td><a href=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2020\/12\/cdf22467335a48c50a5c7911e45e7f5f.png\" rel=\"lightbox-8\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-3480\" src=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2020\/12\/cdf22467335a48c50a5c7911e45e7f5f.png\" alt=\"\" width=\"269\" height=\"141\" \/><\/a><\/td>拉斯维加斯网址9888<td>拉斯维加斯网址9888<h4>9. Backside Via<\/h4>拉斯维加斯网址9888<p>Notch free process<\/p>拉斯维加斯网址9888<p><a href=\"https:\/\/www.ulvac.co.jp\/wiki\/en\/process_g_baw_tech\/2\">Process Technology for BAW device<\/a><\/td>拉斯维加斯网址9888<\/tr>拉斯维加斯网址9888<tr>拉斯维加斯网址9888<td><a href=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2020\/12\/f4b5705fa8f6117328e9e064c68d6693.png\" rel=\"lightbox-9\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-3481\" src=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2020\/12\/f4b5705fa8f6117328e9e064c68d6693.png\" alt=\"\" width=\"278\" height=\"182\" \/><\/a><\/td>拉斯维加斯网址9888<td>拉斯维加斯网址9888<h4>10. Forming Contact electrode<\/h4>拉斯维加斯网址9888<p>High productivity with liftoff evaporation<\/p>拉斯维加斯网址9888<p><a href=\"https:\/\/www.ulvac.co.jp\/wiki\/en\/process_g_baw_tech\/2\">Process Technology for BAW device<\/a><\/td>拉斯维加斯网址9888<\/tr>拉斯维加斯网址9888<\/tbody>拉斯维加斯网址9888<\/table>拉斯维加斯网址9888<p><\/p>拉斯维加斯网址9888<h4 class=\"mod-title-h1 mod-title-h1--center mgb-pc--50 mgb-sp--55\" style=\"text-align: center;\"><strong>Contact Us<\/strong><\/h4>拉斯维加斯网址9888<h4 style=\"text-align: center;\"><strong><a target=\"_blank\" href=\"https:\/\/www.ulvac.co.jp\/en\/contact\/elec_inquiry\/index.html\" rel=\"noopener\">https:\/\/www.ulvac.co.jp\/en\/contact\/elec_inquiry\/<\/a><\/strong><\/h4>拉斯维加斯网址9888","protected":false},"excerpt":{"rendered":"<p>A BAW device is a filter that extracts electrical signals in a specific frequency band by using the bulk vibration of a piezoelectric material.<\/p>\n","protected":false},"author":17,"featured_media":3950,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[77,73],"tags":[],"class_list":["post-3860","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-baw","category-process-flow-en"],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/posts\/3860"}],"collection":[{"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/users\/17"}],"replies":[{"embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/comments?post=3860"}],"version-history":[{"count":5,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/posts\/3860\/revisions"}],"predecessor-version":[{"id":4794,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/posts\/3860\/revisions\/4794"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/media\/3950"}],"wp:attachment":[{"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/media?parent=3860"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/categories?post=3860"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/tags?post=3860"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}