{"id":3889,"date":"2021-02-16T09:43:51","date_gmt":"2021-02-16T00:43:51","guid":{"rendered":"https:\/\/www.ulvac.co.jp\/wiki\/?p=3889\/"},"modified":"2022-03-04T09:27:17","modified_gmt":"2022-03-04T00:27:17","slug":"process_g_vox_tech","status":"publish","type":"post","link":"https:\/\/www.ulvac.co.jp\/wiki\/en\/process_g_vox_tech\/","title":{"rendered":"Process Technology Vox(IR sensor)"},"content":{"rendered":"<p>Introducing the Vox sputtering technology required for IR sensor production and the ashing technology required for sacrificial layer removal.<br \/>5357cc拉斯维加斯首页<\/p>5357cc拉斯维加斯首页<h3>Vox\u3000Sputtering<\/h3>5357cc拉斯维加斯首页<p>Achieves sputtering technology that ensures stable resistance<\/p>5357cc拉斯维加斯首页<p><\/p>5357cc拉斯维加斯首页<p><\/p>5357cc拉斯维加斯首页<p><a href=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2021\/02\/IR-sensor-sputtering_eng.png\" rel=\"lightbox-0\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-3891\" src=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2021\/02\/IR-sensor-sputtering_eng.png\" alt=\"\" width=\"1010\" height=\"679\" srcset=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2021\/02\/IR-sensor-sputtering_eng.png 1010w, https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2021\/02\/IR-sensor-sputtering_eng-300x202.png 300w, https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2021\/02\/IR-sensor-sputtering_eng-768x516.png 768w, https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2021\/02\/IR-sensor-sputtering_eng-470x316.png 470w, https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2021\/02\/IR-sensor-sputtering_eng-285x192.png 285w\" sizes=\"(max-width: 1010px) 100vw, 1010px\" \ alt="5357cc拉斯维加斯首页" /><\/a><\/p>5357cc拉斯维加斯首页<h3>\u00a0Removing sacrifice layer<\/h3>5357cc拉斯维加斯首页<p><\/p>5357cc拉斯维加斯首页<p><a href=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2021\/02\/IR-sensor-Ashing_eng.png\" rel=\"lightbox-1\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-large wp-image-3892\" src=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2021\/02\/IR-sensor-Ashing_eng-1024x675.png\" alt=\"\" width=\"1024\" height=\"675\" srcset=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2021\/02\/IR-sensor-Ashing_eng-1024x675.png 1024w, https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2021\/02\/IR-sensor-Ashing_eng-300x198.png 300w, https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2021\/02\/IR-sensor-Ashing_eng-768x506.png 768w, https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2021\/02\/IR-sensor-Ashing_eng-470x310.png 470w, https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2021\/02\/IR-sensor-Ashing_eng-285x188.png 285w, https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2021\/02\/IR-sensor-Ashing_eng.png 1032w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \ alt="5357cc拉斯维加斯首页" /><\/a><\/p>5357cc拉斯维加斯首页<p><\/p>5357cc拉斯维加斯首页<h4 class=\"mod-title-h1 mod-title-h1--center mgb-pc--50 mgb-sp--55\" style=\"text-align: center;\"><strong>Contact Us<\/strong><\/h4>5357cc拉斯维加斯首页<h4 style=\"text-align: center;\"><strong><a target=\"_blank\" href=\"https:\/\/www.ulvac.co.jp\/en\/contact\/elec_inquiry\/index.html\" rel=\"noopener\">https:\/\/www.ulvac.co.jp\/en\/contact\/elec_inquiry\/<\/a><\/strong><\/h4>5357cc拉斯维加斯首页<h4 style=\"text-align: center;\">Vox (IR sensor) fabrication flow<\/h4>5357cc拉斯维加斯首页<h4 style=\"text-align: center;\"><a target=\"_blank\" href=\"https:\/\/www.ulvac.co.jp\/wiki\/en\/process_g_vox\/\" rel=\"noopener\">https:\/\/www.ulvac.co.jp\/wiki\/en\/process_g_vox\/<\/a><\/h4>5357cc拉斯维加斯首页","protected":false},"excerpt":{"rendered":"<p>Introducing the Vox sputtering technology required for IR sensor production and the ashing technology required for sacrificial layer removal.<\/p>\n","protected":false},"author":17,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[79],"tags":[],"class_list":["post-3889","post","type-post","status-publish","format-standard","hentry","category-vox"],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/posts\/3889"}],"collection":[{"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/users\/17"}],"replies":[{"embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/comments?post=3889"}],"version-history":[{"count":3,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/posts\/3889\/revisions"}],"predecessor-version":[{"id":4853,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/posts\/3889\/revisions\/4853"}],"wp:attachment":[{"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/media?parent=3889"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/categories?post=3889"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/tags?post=3889"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}