![\"\"](\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2021\/01\/Epi-growth.png\")
<\/a><\/td>5357cc拉斯维加斯首页入口1. Epi growth<\/h4>5357cc拉斯维加斯首页入口
On a GaAs (gallium arsenide) substrate, AlGaAs \/ GaAs layers are epigrown as a laminated structure including a DBR (Distributed Bragg Reflector) multilayer film consisting of several tens of pairs or more and an active layer.<\/td>5357cc拉斯维加斯首页入口<\/tr>5357cc拉斯维加斯首页入口
![\"\"](\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2021\/01\/Forming-mask.png\")
<\/a><\/td>5357cc拉斯维加斯首页入口2. Patterning & Mask forming<\/h4>5357cc拉斯维加斯首页入口
Form a mask pattern to form the epi layer into a column called a mesa<\/td>5357cc拉斯维加斯首页入口<\/tr>5357cc拉斯维加斯首页入口
![\"\"](\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2021\/01\/Mesa-patterning.png\")
<\/a><\/td>5357cc拉斯维加斯首页入口3. Patterning Mesa<\/h4>5357cc拉斯维加斯首页入口
Patterning Mesa by dry etching<\/p>5357cc拉斯维加斯首页入口
Process technology for VCSEL<\/a><\/strong><\/p>5357cc拉斯维加斯首页入口 Introduction of Etching module<\/a><\/strong><\/td>5357cc拉斯维加斯首页入口<\/tr>5357cc拉斯维加斯首页入口 A specific AlGaAs layer designed near the active layer is oxidatively narrowed by wet oxidation (this oxidative narrowing layer is a very important layer that influences the characteristics of the VCSEL as a current and light confinement structure). It also forms a protective film on the side wall of the mesa.<\/td>5357cc拉斯维加斯首页入口<\/tr>5357cc拉斯维加斯首页入口 Electrodes are formed on each of the n-type and p-type layers.<\/td>5357cc拉斯维加斯首页入口<\/tr>5357cc拉斯维加斯首页入口<\/tbody>5357cc拉斯维加斯首页入口<\/table>5357cc拉斯维加斯首页入口 <\/p>5357cc拉斯维加斯首页入口 The market for semiconductor lasers is becoming active as a light source for 3D sensing technologies such as LiDAR, which are required for autonomous driving. As one of them, we will introduce a dry process for VCSELs (Vertical Cavity Surface Emitting Laser), which has merits such as miniaturization and energy saving.<\/p>\n","protected":false},"author":17,"featured_media":3754,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[73,82],"tags":[],"class_list":["post-3912","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-process-flow-en","category-vcsel"],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/posts\/3912"}],"collection":[{"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/users\/17"}],"replies":[{"embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/comments?post=3912"}],"version-history":[{"count":4,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/posts\/3912\/revisions"}],"predecessor-version":[{"id":4812,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/posts\/3912\/revisions\/4812"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/media\/3754"}],"wp:attachment":[{"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/media?parent=3912"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/categories?post=3912"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/tags?post=3912"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}5357cc拉斯维加斯首页入口 \u00a0 ![\"\"](\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2021\/01\/Encapsulation_LD.png\")
<\/a><\/td>5357cc拉斯维加斯首页入口5357cc拉斯维加斯首页入口 4. Forming active layer & encapsulation<\/h4>5357cc拉斯维加斯首页入口
5357cc拉斯维加斯首页入口 ![\"\"](\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2021\/01\/Froming-electrode_ld.png\")
<\/a><\/td>5357cc拉斯维加斯首页入口5357cc拉斯维加斯首页入口 5. Forming electrode<\/h4>5357cc拉斯维加斯首页入口
Contact Us<\/strong><\/h4>5357cc拉斯维加斯首页入口
https:\/\/www.ulvac.co.jp\/en\/contact\/elec_inquiry\/<\/a><\/strong><\/h4>5357cc拉斯维加斯首页入口","protected":false},"excerpt":{"rendered":"