{"id":5341,"date":"2021-11-07T11:29:49","date_gmt":"2021-11-07T02:29:49","guid":{"rendered":"https:\/\/www.ulvac.co.jp\/wiki\/process_g_keyword_bp\/"},"modified":"2023-01-18T08:49:10","modified_gmt":"2023-01-17T23:49:10","slug":"process_g_keyword_bp","status":"publish","type":"post","link":"https:\/\/www.ulvac.co.jp\/wiki\/en\/process_g_keyword_bp\/","title":{"rendered":"What are backing plates?"},"content":{"rendered":"<p><em><strong>Backing plates<\/strong><\/em>\u00a0are one of the components of a sputtering cathode. It is shaped to fit the target and attached on the backside of the target.\u00a0\u00a0<\/p>\n<p>Its main functions are as an electrode for discharging, and as a cooling plate to suppress the temperature rise of the target. Copper is often used for its suitable quality for such functions.<\/p>\n<p>Backing plate contains a channel for cooling water inside. As the target itself has no mechanism to attach to the device, it is attached to the backing plate using <em>Indium (In)<\/em>\u00a0or <em>In alloy<\/em> as a bonding material.<\/p>\n<p>&nbsp;<\/p>\n<p><a href=\"https:\/\/www.ulvac.co.jp\/wiki\/process_g_keyword_sp\/\">Learn more about sputtering technology<\/a><\/p>\n<p><a href=\"https:\/\/www.ulvac.co.jp\/wiki\/process_g_keyword\/\">Glossary of vacuum technology related terms<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>Backing plates\u00a0are one of the components of a sputtering cathode. It is shaped to fit the target and attached on the backside of the target.\u00a0\u00a0<\/p>\n","protected":false},"author":17,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[95],"tags":[],"class_list":["post-5341","post","type-post","status-publish","format-standard","hentry","category-process_g-keyword-en"],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/posts\/5341"}],"collection":[{"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/users\/17"}],"replies":[{"embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/comments?post=5341"}],"version-history":[{"count":13,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/posts\/5341\/revisions"}],"predecessor-version":[{"id":5484,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/posts\/5341\/revisions\/5484"}],"wp:attachment":[{"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/media?parent=5341"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/categories?post=5341"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/en\/wp-json\/wp\/v2\/tags?post=5341"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}