{"id":3178,"date":"2020-04-23T15:33:55","date_gmt":"2020-04-23T06:33:55","guid":{"rendered":"https:\/\/www.ulvac.co.jp\/wiki\/?p=3178\/"},"modified":"2022-12-02T11:29:12","modified_gmt":"2022-12-02T02:29:12","slug":"process_g_sic_ion","status":"publish","type":"post","link":"https:\/\/www.ulvac.co.jp\/wiki\/process_g_sic_ion\/","title":{"rendered":"SiC\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u5411\u3051\u30a4\u30aa\u30f3\u6ce8\u5165"},"content":{"rendered":"

\u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc\u3067\u306e\u6ce8\u5165\u3084\u3001\u9ad8\u6e29\u3068\u4f4e\u6e29\u6ce8\u5165\u306e\u4f7f\u3044\u5206\u3051\u304c\u53ef\u80fd\u306a\u30d7\u30ed\u30bb\u30b9\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002\u307e\u305f\u6d3b\u6027\u5316\u30a2\u30cb\u30fc\u30eb\u306e\u969b\u306eSi\u84b8\u767a\u306b\u3088\u308b\u57fa\u677f\u8352\u308c\u3092\u9632\u3050\u30ab\u30fc\u30dc\u30f3\u30ad\u30e3\u30c3\u30d7\u6280\u8853\u3082\u63d0\u4f9b\u53ef\u80fd\u3067\u3059\u3002<\/p>\n

<\/p>\n

\u8ab2\u984c<\/h3>\n

\u9ad8\u6fc3\u5ea6\u30fb\u4f4e\u6fc3\u5ea6\u6ce8\u5165\u306e\u4e21\u7acb<\/b><\/p>\n

SiC\u306f\u9ad8\u6fc3\u5ea6\u6ce8\u5165\u3092\u884c\u3046\u3068\u7d50\u6676\u6b20\u9665\u304c\u767a\u751f\u3057\u3001\u30a2\u30cb\u30fc\u30eb\u3067\u56de\u5fa9\u3057\u306a\u3044\u306e\u3067\u9ad8\u6e29\u3067\u306e\u51e6\u7406\u304c\u5fc5\u8981\u3002\u4e00\u65b9\u3001\u4f4e\u6fc3\u5ea6\u306e\u6ce8\u5165\u3067\u306f\u5e38\u6e29\u6ce8\u5165\u306e\u65b9\u304c\u7279\u6027\u304c\u826f\u3044\u3053\u3068\u304c\u77e5\u3089\u308c\u3066\u3044\u308b\u3002<\/p>\n

SiC<\/b>\u306e\u71b1\u62e1\u6563<\/b><\/p>\n

SiC\u306f\u71b1\u62e1\u6563\u304c\u3057\u306b\u304f\u3044\u305f\u3081\u3001\u3088\u308a\u6df1\u304f\u6ce8\u5165\u3059\u308b\u306b\u306f\u3088\u308a\u9ad8\u3044\u30a8\u30cd\u30eb\u30ae\u30fc\u304c\u5fc5\u8981\u3002<\/p>\n

\u9ad8\u6e29\u30d7\u30ed\u30bb\u30b9\u306b\u3088\u308b\u8868\u9762\u8352\u308c<\/b><\/p>\n

SiC\u306e\u6d3b\u6027\u5316\u6e29\u5ea6\u306f1600~1800\u2103\u3067\u884c\u308f\u308c\u308b\u305f\u3081\u3001Si\u629c\u3051\u304c\u8d77\u304d\u8868\u9762\u8352\u308c\u306e\u554f\u984c\u3092\u5f15\u304d\u8d77\u3053\u3057\u307e\u3059\u3002<\/p>\n

 <\/p>\n

\u89e3\u6c7a\u7b56<\/h3>\n

\u9ad8\u6e29\u3001\u5e38\u6e29\u6ce8\u5165\u30d7\u30ed\u30bb\u30b9<\/b><\/p>\n

\u9ad8\u6e29600\u2103\u3068\u5e38\u6e29\u6ce8\u5165\u3092\u77ac\u6642\u306b\u5207\u308a\u66ff\u3048\u3089\u308c\u308bDual Platen\u642d\u8f09\u3057\u3001\u9ad8\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u3092\u5b9f\u73fe
\n\u9ad8\u6e29\u51e6\u7406\u306f\u30a2\u30eb\u30d0\u30c3\u30af\u72ec\u81ea\u306e\u57fa\u677f\u306e\u6607\u6e29\u65b9\u5f0f\u306b\u3088\u308a\u9ad8\u6e29\u3067\u306e\u30d7\u30ed\u30bb\u30b9\u5b89\u5b9a\u6027\u3001\u642c\u9001\u4fe1\u983c\u6027\u3092\u5b9f\u73fe<\/p>\n\n\n\n\n
\"\"<\/a><\/td>\n\"\"<\/a><\/td>\n<\/tr>\n
\u9ad8\u6fc3\u5ea6\u6ce8\u5165\u306e\u5834\u5408\u3001\u30a2\u30cb\u30fc\u30eb\u3057\u3066\u3082\u7d50\u6676\u304c\u56de\u5fa9\u305b\u305a\u8ee2\u79fb\u3057\u3066\u3057\u307e\u3046\u3002<\/td>\n\u4f4e\u6fc3\u5ea6\u6ce8\u5165\u306e\u5834\u5408\u3001\u5ba4\u6e29\u3067\u3082\u7d50\u6676\u306f\u7dad\u6301\u3055\u308c\u3066\u3044\u308b\u3002<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc\u6ce8\u5165<\/b><\/p>\n

10kV~1.2MeV\u307e\u3067\u306e\u30a8\u30cd\u30eb\u30ae\u30fc\u3092\u30ab\u30d0\u30fc\u3057\u3001\u5e83\u3044\u30d7\u30ed\u30bb\u30b9\u7bc4\u56f2\u306b\u5bfe\u5fdc\u53ef\u80fd<\/p>\n

\"\"<\/a>
10KV~1.2MeV\u306e\u30dc\u30c3\u30af\u30b9\u30d7\u30ed\u30d5\u30a1\u30a4\u30eb<\/figcaption><\/figure>\n

SiC<\/b>\u7279\u6709\u306e\u9ad8\u6e29\u30d7\u30ed\u30bb\u30b9\u3092\u4e00\u74b0\u3067\u63d0\u6848<\/b><\/p>\n

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\"\"<\/a>
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\"\"<\/a><\/p>\n

\u95a2\u9023\u88c5\u7f6e\u306e\u7d39\u4ecb\u306f\u3053\u3061\u3089<\/a><\/strong><\/p>\n

\u304a\u554f\u3044\u5408\u308f\u305b\u306f\u3053\u3061\u3089<\/a><\/strong><\/p>\n","protected":false},"excerpt":{"rendered":"

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