{"id":5093,"date":"2022-06-22T14:38:54","date_gmt":"2022-06-22T05:38:54","guid":{"rendered":"https:\/\/www.ulvac.co.jp\/wiki\/?p=5093\/"},"modified":"2022-07-22T07:48:06","modified_gmt":"2022-07-21T22:48:06","slug":"process_g_jvia2021-na-series","status":"publish","type":"post","link":"https:\/\/www.ulvac.co.jp\/wiki\/process_g_jvia2021-na-series\/","title":{"rendered":"JVIA\u771f\u7a7a\u88c5\u7f6e\u90e8\u9580\u8cde2021\u53d7\u8cde NA-series"},"content":{"rendered":"<p>\u534a\u5c0e\u4f53\u30d1\u30c3\u30b1\u30fc\u30b8\u7528\u306e\u30c9\u30e9\u30a4\u30a2\u30c3\u30b7\u30f3\u30b0\u88c5\u7f6eNA-series\u306f\u3001\u201d\u9ad8\u5bc6\u5ea6\u5b9f\u88c5\u5411\u3051\u4f4e\u30c0\u30e1\u30fc\u30b8\u30d7\u30e9\u30ba\u30de\u30a2\u30c3\u30b7\u30f3\u30b0\u6280\u8853\u201d\u3068\u3044\u3046\u984c\u76ee\u3067\u3001JVIA\u771f\u7a7a\u88c5\u7f6e\u90e8\u9580\u8cde2021\u3092\u53d7\u8cde\u3057\u307e\u3057\u305f\u3002<\/p>\n<p><a href=\"https:\/\/jvia.gr.jp\/news\/files\/2021jviahyousyou.pdf\">https:\/\/jvia.gr.jp\/news\/files\/2021jviahyousyou.pdf<\/a><\/p>\n<p><\/p>\n<p>NA-series\u306f\u3001\u9ad8\u5bc6\u5ea6\u5b9f\u88c5\u88fd\u54c1\u3092\u88fd\u9020\u3059\u308b\u305f\u3081\u306e\u30af\u30ea\u30fc\u30cb\u30f3\u30b0\u3001\u8868\u9762\u6539\u8cea\u3001\u8868\u9762\u5f62\u72b6\u5236\u5fa1\u3092\u5b9f\u65bd\u3059\u308b\u305f\u3081\u306e\u30d7\u30e9\u30ba\u30de\u51e6\u7406\u88c5\u7f6e\u3067\u3059\u3002\u4eca\u307e\u3067\u306e\u91cf\u7523\u5b9f\u7e3e\u3001\u5b66\u4f1a\u8868\u5f70\u7b49\u306e\u6210\u679c\u304c\u8a8d\u3081\u3089\u308c\u3001\u4eca\u56de\u3001\u771f\u7a7a\u88c5\u7f6e\u90e8\u9580\u8cde\u3092\u53d7\u8cde\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3057\u305f\u3002<\/p>\n<p>Dry ashing\u88c5\u7f6e : NA-series<\/p>\n<p>&lt;\u4ee3\u8868\u7684\u306a\u30d7\u30ed\u30bb\u30b9\uff1e<\/p>\n<p>\u30fbDescum<\/p>\n<p>\u30fbDesmear<\/p>\n<p>\u30fb\u8868\u9762\u6539\u8cea\u51e6\u7406<\/p>\n<p>\u30fb\u8868\u9762\u5f62\u72b6\u5236\u5fa1<\/p>\n<p>\u30fbEtch back<\/p>\n<p>\u30fbPretreatment\u3000\u30e1\u30c3\u30ad\/ Underfill<\/p>\n<p>&lt;\u4e3b\u306a\u5916\u90e8\u767a\u8868&gt;<\/p>\n<p>\u30fbECTC2022 Session 20<\/p>\n<p>\u201cNovel Plasma Process for Build-Up Film in the Fine Wiring \u3000Fabrication\u201d<\/p>\n<p>\u30fbECTC2022 Session 20<\/p>\n<p>\u201cThe Investigation of Dry Plasma Technology in Each Step for the \u3000Fabrication of High Performance Redistribution Layer\u201d<\/p>\n<p>&lt;\u53d7\u8cde\u6b74&gt;<\/p>\n<p>\u30fb ICEPT2020 Outstanding Paper Award<\/p>\n<p>\u30fb JIEP\u6280\u8853\u8cde2021<\/p>\n<p>\u30fb JVIA \u771f\u7a7a\u88c5\u7f6e\u90e8\u9580\u8cde2021<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-5096\" 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100vw, 300px\" \/><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-5097\" src=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2022\/06\/IMG_5377-300x225.jpg\" alt=\"\" width=\"300\" height=\"225\" srcset=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2022\/06\/IMG_5377-300x225.jpg 300w, https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2022\/06\/IMG_5377-470x353.jpg 470w, https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2022\/06\/IMG_5377-285x214.jpg 285w, https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2022\/06\/IMG_5377.jpg 640w\" sizes=\"(max-width: 300px) 100vw, 300px\" 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[&hellip;]<\/p>\n","protected":false},"author":17,"featured_media":5097,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[65],"tags":[],"class_list":["post-5093","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-wlp"],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.ulvac.co.jp\/wiki\/wp-json\/wp\/v2\/posts\/5093"}],"collection":[{"href":"https:\/\/www.ulvac.co.jp\/wiki\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.ulvac.co.jp\/wiki\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/wp-json\/wp\/v2\/users\/17"}],"replies":[{"embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/wp-json\/wp\/v2\/comments?post=5093"}],"version-history":[{"count":6,"href":"https:\/\/www.ulvac.co.jp\/wiki\/wp-json\/wp\/v2\/posts\/5093\/revisions"}],"predecessor-version":[{"id":5128,"href":"https:\/\/www.ulvac.co.jp\/wiki\/wp-json\/wp\/v2\/posts\/5093\/revisions\/5128"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/wp-json\/wp\/v2\/media\/5097"}],"wp:attachment":[{"href":"https:\/\/www.ulvac.co.jp\/wiki\/wp-json\/wp\/v2\/media?parent=5093"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/wp-json\/wp\/v2\/categories?post=5093"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/wp-json\/wp\/v2\/tags?post=5093"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}