{"id":3653,"date":"2020-04-23T15:33:55","date_gmt":"2020-04-23T06:33:55","guid":{"rendered":"https:\/\/www.ulvac.co.jp\/wiki\/process_g_sic_ion\/"},"modified":"2021-11-11T10:12:12","modified_gmt":"2021-11-11T01:12:12","slug":"process_g_sic_ion","status":"publish","type":"post","link":"https:\/\/www.ulvac.co.jp\/wiki\/zh-hans\/process_g_sic_ion\/","title":{"rendered":"SiC\u529f\u7387\u5668\u4ef6\u79bb\u5b50\u6ce8\u5165"},"content":{"rendered":"

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<\/p>\n

Challenges<\/strong><\/h3>\n

\u517c\u987e\u9ad8\u6d53\u5ea6\u00b7\u4f4e\u6d53\u5ea6\u6ce8\u5165<\/b><\/p>\n

SiC\u5728\u8fdb\u884c\u9ad8\u6d53\u5ea6\u6ce8\u5165\u65f6\u4f1a\u53d1\u751f\u6676\u4f53\u7f3a\u9677\uff0c\u9000\u706b\u4e5f\u4e0d\u4f1a\u6062\u590d\uff0c\u56e0\u6b64\u9700\u8981\u5728\u9ad8\u6e29\u4e0b\u5904\u7406\u3002 \u53e6\u4e00\u65b9\u9762\uff0c\u4f17\u6240\u5468\u77e5\uff0c\u5728\u4f4e\u6d53\u5ea6\u6ce8\u5165\u4e2d\uff0c\u5e38\u6e29\u6ce8\u5165\u5177\u6709\u66f4\u597d\u7684\u7279\u6027\u3002<\/p>\n

SiC\u7684\u70ed\u6269\u6563<\/b><\/p>\n

\u7531\u4e8eSiC\u96be\u4ee5\u70ed\u6269\u6563\uff0c\u56e0\u6b64\u9700\u8981\u66f4\u9ad8\u7684\u80fd\u91cf\u624d\u80fd\u66f4\u6df1\u5165\u5730\u6ce8\u5165\u3002<\/p>\n

\u9ad8\u6e29\u5de5\u827a\u5f15\u8d77\u7684\u8868\u9762\u7c97\u7cd9<\/strong><\/p>\n

\u7531\u4e8e SiC \u7684\u6d3b\u5316\u6e29\u5ea6\u5728 1600 \u81f3 1800\u00b0C \u4e4b\u95f4\uff0cSi\u8131\u843d\u5f15\u8d77\u8868\u9762\u7c97\u7cd9\u7684\u95ee\u9898\u3002<\/p>\n

 <\/p>\n

\u89e3\u51b3\u65b9\u6848<\/strong><\/h3>\n

\u9ad8\u6e29\u3001\u5e38\u6e29\u6ce8\u5165\u5de5\u827a<\/strong><\/p>\n

\u642d\u8f7d\u53ef\u77ac\u95f4\u5207\u6362\u9ad8\u6e29600\u2103\u548c\u5e38\u6e29\u6ce8\u5165\u7684Dual Platen\uff0c\u5b9e\u73b0\u9ad8\u4ea7\u80fd
\n\u9ad8\u6e29\u5904\u7406\u901a\u8fc7ULVAC\u72ec\u6709\u7684\u57fa\u677f\u5347\u6e29\u65b9\u5f0f\u5b9e\u73b0\u9ad8\u6e29\u4e0b\u7684\u5de5\u827a\u7a33\u5b9a\u6027\u548c\u642c\u9001\u53ef\u9760\u6027<\/p>\n\n\n\n\n
\"\"<\/a><\/td>\n\"\"<\/a><\/td>\n<\/tr>\n
\u5728\u9ad8\u6d53\u5ea6\u6ce8\u5165\u7684\u60c5\u51b5\u4e0b\uff0c\u5373\u4f7f\u8fdb\u884c\u9000\u706b\uff0c\u6676\u4f53\u4e5f\u4e0d\u4f1a\u6062\u590d\u3002<\/td>\n\u5728\u4f4e\u6d53\u5ea6\u6ce8\u5165\u60c5\u51b5\u4e0b\uff0c\u5373\u4f7f\u5728\u5ba4\u6e29\u4e0b\u4e5f\u7ef4\u6301\u7ed3\u6676\u3002<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\u9ad8\u80fd\u91cf\u6ce8\u5165<\/b><\/p>\n

\u8986\u76d610kV~1.2MeV\u7684\u80fd\u91cf\u3001\u652f\u6301\u5e7f\u6cdb\u7684\u5de5\u827a\u8303\u56f4\u3002<\/p>\n

\"\"<\/a>
10KV~1.2MeV\u7684Box profile<\/figcaption><\/figure>\n

SiC\u7279\u6709\u7684\u9ad8\u6e29\u5de5\u827a<\/b><\/p>\n

\u79bb\u5b50\u6ce8\u5165\u3001Carbon-Cap<\/strong>\u3001\u9000\u706b\u5de5\u827a\uff0c\u7231\u53d1\u79d1\u53ef\u4ee5\u63d0\u4f9b\u5168\u9762\u5de5\u827a\u89e3\u51b3\u65b9\u6848\u3002<\/p>\n

\"\"<\/a>
\u79bb\u5b50\u6ce8\u5165\uff0bCAP\uff08\u5404\u6e29\u5ea6\u4e0b\u9000\u706b\u5904\u7406\u540e\u7684\u8868\u9762\u72b6\u6001\uff09<\/figcaption><\/figure>\n

\"\"<\/a><\/p>\n

\u76f8\u5173\u8bbe\u5907\u4ecb\u7ecd<\/a><\/strong><\/p>\n

\u70b9\u51fb\u54a8\u8be2<\/strong><\/a><\/p>\n","protected":false},"excerpt":{"rendered":"

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