{"id":3657,"date":"2020-04-27T16:17:58","date_gmt":"2020-04-27T07:17:58","guid":{"rendered":"https:\/\/www.ulvac.co.jp\/wiki\/process_g_gan_trench\/"},"modified":"2021-01-26T14:05:35","modified_gmt":"2021-01-26T05:05:35","slug":"process_g_gan_trench","status":"publish","type":"post","link":"https:\/\/www.ulvac.co.jp\/wiki\/zh-hans\/process_g_gan_trench\/","title":{"rendered":"GaN\u6c9f\u69fd\u523b\u8680"},"content":{"rendered":"<p><strong>\u6c9f\u69fd\u7ed3\u6784\u53ef\u5b9e\u73b0\u529f\u7387\u5668\u4ef6\u7684\u5c0f\u578b\u5316\u548c\u4f4e\u7535\u963b\uff0c\u6211\u4eec\u63d0\u4f9b\u5b9e\u73b0\u6c9f\u69fd\u7ed3\u6784\u7684\u5e72\u6cd5\u523b\u8680\u6280\u672f\u3002<\/strong><\/p>\n<h3><strong>Challenge<\/strong><\/h3>\n<h4><\/h4>\n<h4><b>\u6c9f\u69fd\u5f62\u72b6\u7684\u63a7\u5236<\/b><\/h4>\n<p>\u4e3a\u4e86\u9632\u6b62\u7535\u89e3\u96c6\u4e2d\u5230\u5e95\u9762\u89d2\u90e8\u800c\u5bfc\u81f4\u5668\u4ef6\u7834\u574f\uff0c\u5c06\u5e95\u90e8\u52a0\u5de5\u6210\u5706\u5f62\u5f62\u72b6<\/p>\n<h4><strong>\u5bf9\u6c9f\u69fd\u4fa7\u58c1\u7684\u635f\u574f<\/strong><\/h4>\n<p>\u8868\u9762\u6709\u635f\u574f\u7684\u8bdd\u4f1a\u5f71\u54cd\u5668\u4ef6\u6027\u80fd<\/p>\n<p>&nbsp;<\/p>\n<h3><strong>\u89e3\u51b3\u65b9\u6848<\/strong><\/h3>\n<p>&nbsp;<\/p>\n<h4><b>\u5b9e\u73b0\u5e73\u6ed1\u7684\u4fa7\u58c1\u548c\u5706\u5f62\u5e95\u90e8<\/b><\/h4>\n<p>\u4f18\u5316\u523b\u8680\u6761\u4ef6\u4ee5\u63a7\u5236\u6c9f\u69fd\u5f62\u72b6<\/p>\n<h4><b>\u9664\u53bbDamage Layer<\/b><\/h4>\n<p>\u901a\u8fc7\u8d85\u4f4e\u901f\u523b\u8680\u548c\u4f4e\u6e29\u9000\u706b\u53bb\u9664\u5236\u4f5c\u6c9f\u69fd\u5f62\u6210\u7684Damage Layer<\/p>\n<table>\n<tbody>\n<tr>\n<td><a href=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2016\/04\/GaN_trench.png\" rel=\"lightbox-0\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter wp-image-3201 size-medium\" src=\"https:\/\/www.ulvac.co.jp\/wiki\/wp-content\/uploads\/2016\/04\/GaN_trench-300x240.png\" alt=\"\" width=\"300\" height=\"240\" \/><\/a><\/td>\n<td>\n<table width=\"472\">\n<tbody>\n<tr>\n<td width=\"161\">material<\/td>\n<td width=\"312\">GaN<\/td>\n<\/tr>\n<tr>\n<td width=\"161\">mask<\/td>\n<td width=\"312\">SiO2<\/td>\n<\/tr>\n<tr>\n<td width=\"161\">size<\/td>\n<td width=\"312\">W 0.5um, D 1.5um<\/td>\n<\/tr>\n<tr>\n<td width=\"161\">ER<\/td>\n<td width=\"312\">400nm\/min<\/td>\n<\/tr>\n<tr>\n<td width=\"161\">Selectivity<\/td>\n<td width=\"312\">\uff1e5.0<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><a href=\"https:\/\/www.ulvac-shanghai.com\/contact\/\"><strong>\u70b9\u51fb\u54a8\u8be2<\/strong><\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u6c9f\u69fd\u7ed3\u6784\u53ef\u5b9e\u73b0\u529f\u7387\u5668\u4ef6\u7684\u5c0f\u578b\u5316\u548c\u4f4e\u7535\u963b\uff0c\u6211\u4eec\u63d0\u4f9b\u5b9e\u73b0\u6c9f\u69fd\u7ed3\u6784\u7684\u5e72\u6cd5\u523b\u8680\u6280\u672f\u3002<\/p>\n","protected":false},"author":17,"featured_media":3201,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[64,57],"tags":[],"class_list":["post-3657","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-power-device-zh-hans","category-57"],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.ulvac.co.jp\/wiki\/zh-hans\/wp-json\/wp\/v2\/posts\/3657"}],"collection":[{"href":"https:\/\/www.ulvac.co.jp\/wiki\/zh-hans\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.ulvac.co.jp\/wiki\/zh-hans\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/zh-hans\/wp-json\/wp\/v2\/users\/17"}],"replies":[{"embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/zh-hans\/wp-json\/wp\/v2\/comments?post=3657"}],"version-history":[{"count":4,"href":"https:\/\/www.ulvac.co.jp\/wiki\/zh-hans\/wp-json\/wp\/v2\/posts\/3657\/revisions"}],"predecessor-version":[{"id":3821,"href":"https:\/\/www.ulvac.co.jp\/wiki\/zh-hans\/wp-json\/wp\/v2\/posts\/3657\/revisions\/3821"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/zh-hans\/wp-json\/wp\/v2\/media\/3201"}],"wp:attachment":[{"href":"https:\/\/www.ulvac.co.jp\/wiki\/zh-hans\/wp-json\/wp\/v2\/media?parent=3657"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/zh-hans\/wp-json\/wp\/v2\/categories?post=3657"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.ulvac.co.jp\/wiki\/zh-hans\/wp-json\/wp\/v2\/tags?post=3657"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}