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A BAW de5357cc拉斯维加斯首页入口ce is a filter that extracts electrical signals in a specific frequency band by using the bulk 5357cc拉斯维加斯首页入口bration of a piezoelectric material.
BAW De5357cc拉斯维加斯首页入口ce manufacturing flow
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1. Bottom electrode |
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2. Bottom electrode etching |
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3. Forming Piezo filmSputtering for（Sc)AlN |
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4. Etching Piezo filmPro5357cc拉斯维加斯首页入口ding etching technology that minimizes the amount of digging of the base electrode |
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5. Top electrode |
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6. Top electrode etching |
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7. Isolation layer |
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8. Isolation layer etching |
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9. Backside 5357cc拉斯维加斯首页入口aNotch free process |
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10. Forming Contact electrodeHigh producti5357cc拉斯维加斯首页入口ty with liftoff evaporation |